What about the Terminator Franchise which was given rise to 3 films ,and more on the way and a hit tv show on fox Chronicle of Sarah Connors, Cameron made an impact here but we can also credit to Harlan Ellison on this one as well, Ellison's Outer limits teleplays for his story Solider and Demon With A Glass hand were definitely strong influences here to say the least. He sued Cameron successfully over this one
Though Terminator was not the first Cyborg movie, There was French Italian Made sciece fiction movie made in 1961 called Planets against Us, Actor Michael Lemoine played five Cyborgs whose job was bring down all the governments on Earth and pave the way for an Alien Invasion.
Roger Cormans' !967 Movie Cyborg. Actor Micheal Rene Plays a Cyborg freedom fighter sent back in time to try prevent a certain technology from being developed which will lead to a machine like dictatorship in the future.